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Title:
LIQUID CRYSTAL DISPLAY SUBSTRATE
Document Type and Number:
Japanese Patent JPH07128676
Kind Code:
A
Abstract:

PURPOSE: To prevent electric short of a wiring layer essentially comprising aluminum with upper layers due to hilloak or whiskers of the wiring layer by forming a metal layer having higher melting point than aluminum on the wiring layer where a conductive layer or a semiconductor layer is to be laminated.

CONSTITUTION: In this liquid crystal display substrate, at least a wiring layer 2A essentially comprising aluminum is formed on one surface of a transparent substrate 1 where a liquid crystal is to be present, and a conductive layer or a semiconductor layer 5 with an insulating film 7A is laminated on the aluminum layer 2A. At least on the upper surface of the wiring layer 2A where the conductive layer or semiconductor layer 5 are to be laminated, a metal layer 2B having higher melting point than aluminum is formed. Namely, a tantalum layer 2B having higher melting point than aluminum is formed on the upper surface of gate signal lines 2 comprising aluminum. Thereby, even when a semiconductor layer 5 is laminated with an interlayer insulating film 7, electric short between the gate signal wire 2 and the semiconductor layer 5 can be prevented.


Inventors:
HASHIMOTO YUICHI
HIROSHIMA MINORU
YANAI MASAHIRO
ORITSUKI RYOJI
KOZAI KIYAO
HORII JUICHI
MATSUDA MASAAKI
ASHIZAWA KEIICHIRO
Application Number:
JP27530793A
Publication Date:
May 19, 1995
Filing Date:
November 04, 1993
Export Citation:
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Assignee:
HITACHI LTD
International Classes:
G02F1/1343; G02F1/136; G02F1/1368; (IPC1-7): G02F1/1343; G02F1/136
Attorney, Agent or Firm:
Akita Aki