Title:
LIQUID DISCHARGE HEAD AND METHOD OF MANUFACTURING THE SAME
Document Type and Number:
Japanese Patent JP2023020147
Kind Code:
A
Abstract:
To provide a highly reliable liquid discharge head that has its substrate suppressed from being fused and secures sufficient strength between the substrate and a member joined to the substrate.SOLUTION: A liquid discharge head 10 has: a substrate 3 which is made of silicon and has a first surface 3a and a second surface 3b on the opposite side from the first surface 3a; a discharge port formation member 8 which is joined to the first surface 3a of the substrate 3 and has a discharge port 9 formed to discharge liquid; and a joined member 20 which is joined to a second surface 3b of the substrate 3. The substrate 3 has a through flow passage 4 formed penetrating the substrate 3 and supplying the liquid to the discharge port 9, and also has a first protection film 5 formed of metal oxide on an inner surface of the through flow passage 4. A second protection film 7 is formed of a silicon compound entirely over the second surface 3b of the substrate 3.SELECTED DRAWING: Figure 1
Inventors:
TAKEUCHI SOTA
UYAMA MASAYA
UYAMA MASAYA
Application Number:
JP2021125351A
Publication Date:
February 09, 2023
Filing Date:
July 30, 2021
Export Citation:
Assignee:
CANON KK
International Classes:
B41J2/16; B41J2/14
Attorney, Agent or Firm:
Akio Miyazaki
Masaaki Ogata
Masaaki Ogata
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