Title:
LIQUID DROP-PUTTING DEVICE AND MANUFACTURE OF ELECTRON-EMITTING ELEMENT, ELECTRON-SOURCE SUBSTRATE, ELECTRON SOURCE, DISPLAY PANEL AND IMAGE-FORMING DEVICE USING THE DEVICE
Document Type and Number:
Japanese Patent JP3397564
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: Among liquid drops formed by a liquid drop-putting mechanism, non-necessary liquid drops are shielded with a shutter and only necessary liquid drops are put on a substrate, resulting in easily forming, a large scale surface conductive type electron emitting element.
SOLUTION: On a washed substrate 1, element electrodes 2 and 3 are formed. By putting a liquid drop 8 on the resultant substrate 1, a thin film is formed. As a liquid drop putting mechanism 6, an ink jet type one is used for example. As the material of the liquid drop, electrically conductive film material solution is used. At the formation of the thin electrically conductive film of electron emitting element by putting the electrically conductive film material solution in the state of the liquid drop 8 onto the substrate 1, the state of the liquid drop 8 formed at the start after the leaving of the liquid drop putting mechanism 6, for example, for a certain period of time as it is may be somewhat different from the state of the liquid drop 8 formed after the above-mentioned one. The liquid drop under the state just mentioned above is shielded with a shutter 7 so as not to be put on the substrate 1. Next, the thin film is fired so as to form a thin electrically conductive film 4 and in succession forming- treated so as to form an electron emitting hole 5 through the change of its structure at the part of a thin electrically conductive film 4.
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Inventors:
Kazuhiro Samdo
Mitsutoshi Hasegawa
Mitsutoshi Hasegawa
Application Number:
JP4409796A
Publication Date:
April 14, 2003
Filing Date:
February 07, 1996
Export Citation:
Assignee:
Canon Inc
International Classes:
B41J2/07; H01J1/30; H01J9/02; H01J31/12; B41J2/01; (IPC1-7): H01J9/02; B41J2/01; B41J2/07
Domestic Patent References:
| JP3153359A | ||||
| JP49123235A | ||||
| JP49115733A | ||||
| JP645095A | ||||
| JP62181490A | ||||
| JP63200041A | ||||
| JP6464290A | ||||
| JP1296532A | ||||
| JP4121702A |
Other References:
【文献】特許3241251(JP,B2)
Attorney, Agent or Firm:
Tetsuya Ito