To provide a liquid droplet ejection head in which first sealing of sealing the interior of a gap formed between an electrode glass substrate and a silicon cavity substrate is carried out simultaneously with anodic joining of the electrode glass substrate and the silicon cavity substrate each other, and to provide a liquid droplet ejector, a manufacturing method for the liquid droplet ejection head and a manufacturing method for the liquid droplet ejector.
The liquid droplet ejection head 100 comprises a cavity substrate 1, a glass substrate 2 in which an electrode part (discrete electrodes 8, a lead part 10 and a terminal part 11) is formed, and a nozzle substrate 3. A plurality of recesses 9 for forming the discrete electrodes 8 and the lead part 10, and a concave surface 26 for forming the terminal part 11 are formed in the glass substrate. A projecting part (first sealing part) formed of a sealant is prepared on the lead part 10 in the recess 9 of the concave surface 26 side.
COPYRIGHT: (C)2008,JPO&INPIT
Kiyoshi Yasushima
Souji Sasaki
Noboru Omura
Takanashi Norio