To provide a liquid feeding apparatus that has a large liquid feeding flow rate, dispenses with any special sensors, and has high controllability of flow rate and flow velocity.

A liquid feeding module 24 comprises a piezoelectric element 242; a diaphragm 241 that is fixed to the piezoelectric element, where one end can be swung freely; and a voltage supply wire 25 to the piezoelectric element. Additionally, other liquid feeding modules comprise a diaphragm, where a bimorph-type piezoelectric plate is provided on both the surfaces of a metal plate; and a support member, where one end of the diaphragm is fixed and a wire for supplying voltage to the metal plate and the piezoelectric plate is provided. The liquid feeding apparatus comprises a power supply, where a plurality of liquid feeding modules 24 are provided at a channel 23 of a substrate, and voltage is supplied to the pizoelectric element of the liquid feeding module; and a control unit for controlling voltage. Additionally, the liquid feeding module may be arranged so that directions for operating each other are inverted.