Title:
LIQUID PHASE EPITAXIAL GROWING UNIT AND ITS METHOD
Document Type and Number:
Japanese Patent JPS5424576
Kind Code:
A
Abstract:
PURPOSE:To suppress the unevenness of temperature distribution of the substrate and solution as less as possible and to form the growing layers of poly-layer for more than two substrates by one batch, in liquid phase epitaxial growing unit.
Inventors:
OKAZAKI JIROU
ISOZUMI SHIYOUJI
ISOZUMI SHIYOUJI
Application Number:
JP8919177A
Publication Date:
February 23, 1979
Filing Date:
July 27, 1977
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
C30B19/06; H01L21/208; (IPC1-7): B01J17/06; H01L21/208