Title:
CVD用液体原料及びCVD装置
Document Type and Number:
Japanese Patent JP4100546
Kind Code:
B2
Inventors:
Mikami Yoshiharu
St. Ogata
St. Ogata
Application Number:
JP2002088033A
Publication Date:
June 11, 2008
Filing Date:
March 27, 2002
Export Citation:
Assignee:
Tohoku Ricoh Co., Ltd.
International Classes:
C07C49/92; C23C16/18; C23C16/448
Domestic Patent References:
| JP8074055A | ||||
| JP10072475A | ||||
| JP11117069A | ||||
| JP11286494A | ||||
| JP11323556A |
Attorney, Agent or Firm:
Shinji Kashiwagi
Akira Kashiwagi
Akira Kashiwagi