PURPOSE: To correct an error due to the residual capacity, and to perform the accurate measurement at the time of measuring of the load capacity characteristic in a device for inspecting characteristic of a quartz oscillator.
CONSTITUTION: A DUT unit 11, which includes a residual capacity 13, and a load capacity unit 12 are 4-terminal-displayed, and about a ratio α of the input/output voltage at the time of resonance, a α value αs in the case where the DUT unit 11 is shorted and the loading capacity unit 12 is shorted is really measured. An α value α2 in the case where the DUT unit 11 is loaded with a constant known quantity and the load capacity unit 12 is short-circuited is really measured. An α value αs' in the case where the DUT unit 11 is short- circuited and the load capacity unit 12 is loaded with a constant known quantity is really measured. The DUT unit 11 is opened, and the impedance Z0 is computed. The DUT unit 11 is short-circuited, and the impedance Zs is computed. The residual capacity 13 is decided by obtaining an integral between the real measured value and an operation expression. True resonance frequency after the correction is obtained.
HASEGAWA TORU
OSAWA KATSURO
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