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Title:
METHOD FOR Sn ALLOY ELECTROLYTIC PLATING
Document Type and Number:
Japanese Patent JP2013166981
Kind Code:
A
Abstract:

To provide a method for Sn alloy electrolytic plating that allows use of a soluble anode by resolving the problem of metal deposition on an anode when a Sn alloy, such as a Sn-Ag-based alloy, is subjected to electrolytic plating.

The interior of a plating tank 1 is divided into a cathode chamber 4 and an anode chamber 3 by an anion-exchange membrane 2. A Sn ion-containing plating solution is supplied to the cathode chamber 4, and an acid solution is supplied to the anode chamber 3. While electrolytic plating is performed by applying an electrical current between an object to be plated 12 in the cathode chamber 4 and a Sn anode 11 in the anode chamber 3, the acid solution containing Sn ions eluted from the Sn anode 11 as plating progresses is used as a Sn-ion resupply liquid for the plating solution in the cathode chamber 4.


Inventors:
HATTA KENJI
MASUDA AKIHIRO
Application Number:
JP2012029998A
Publication Date:
August 29, 2013
Filing Date:
February 14, 2012
Export Citation:
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Assignee:
MITSUBISHI MATERIALS CORP
International Classes:
C25D21/14; C25D17/00
Attorney, Agent or Firm:
Masakazu Aoyama