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Patent Searching and Data


Title:
MAGNETIC FLUID SEAL DEVICE
Document Type and Number:
Japanese Patent JPH07103339
Kind Code:
A
Abstract:

PURPOSE: To dispense with boring work, and disposition of a pipeline or special filter, simplify the constitution, facilitate assembling work, reduce a cost, prevent intrusion of splashing particles of magnetic fluid into a chamber due to breakage of a magnetic fluid seal unit.

CONSTITUTION: A plurality of permanent magnets 7 and pole pieces 8 are alternately arranged inside a housing 6 for inserting a power transmitting shaft 2 into a chamber 1 in the vacuum ambience from the atmosphere. Magnetic fluid 9 is held between the pole pieces 8 and the circumferential surface of the shaft 2 by a magnetic flux, thus forming a multiple-stage magnetic fluid seal unit 10. A pair of pole pieces 14 holding a permanent magnet 13 are disposed nearer to the chamber than the multiple-stage magnetic fluid seal unit 10 inside the housing 6. An empty dry magnetic gap portion 12 where the magnetic fluid is not filled is interposed between the pole pieces 14 and the circumferential surface of the shaft.


Inventors:
ASAKAWA TERUO
SAEKI HIROAKI
Application Number:
JP24901593A
Publication Date:
April 18, 1995
Filing Date:
October 05, 1993
Export Citation:
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Assignee:
TOKYO ELECTRON LTD
International Classes:
F16J15/43; (IPC1-7): F16J15/43
Attorney, Agent or Firm:
Takehiko Suzue