Title:
磁気センサ
Document Type and Number:
Japanese Patent JP7077679
Kind Code:
B2
Abstract:
To reduce interference between magnetic sensors when a plurality of magnetic sensors are used by being disposed in array form.SOLUTION: A magnetic sensor comprises: a sensor substrate 20; an external magnetic substance 30 provided on an element forming surface 20a between magneto-sensitive elements R1, R3 and magneto-sensitive elements R2, R4; and an external magnetic substance 40 including a first portion 41, a second portion 42 and a third portion 43. The third portion 43 of the external magnetic substance 40 includes a narrow shaped part 43a the width of which in a direction x is progressively narrowed down as it goes away from a reverse side 23, the end face defining the width of the narrow shaped part 43a being curved. According to the present invention, since the third portion 43 of the external magnetic substance 40 has the narrow shaped part 43a, it is possible to reduce interference between the magnetic sensors even when a plurality of magnetic sensors are used by being disposed in array form. Furthermore, since the narrow shaped part is composed of a curved face, it is possible to reduce the leakage of a magnetic field occurring at corners.SELECTED DRAWING: Figure 1
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Inventors:
Hayashi
Shuichi Okawa
Shuichi Okawa
Application Number:
JP2018044140A
Publication Date:
May 31, 2022
Filing Date:
March 12, 2018
Export Citation:
Assignee:
tdk Corporation
International Classes:
G01R33/02; G01R33/09; H01L43/08
Domestic Patent References:
| JP2017161519A | ||||
| JP3180786A | ||||
| JP2302922A |
Foreign References:
| WO2008146809A1 | ||||
| WO2017204151A1 | ||||
| WO2009151023A1 |
Attorney, Agent or Firm:
Mitsuhiro Washito
Ogata Japanese
Yasuyuki Kurose
Ogata Japanese
Yasuyuki Kurose