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Title:
MAGNETO-RESISTANCE EFFECT FILM, MAGNETIC SENSOR, AND ROTATION ANGLE DETECTING DEVICE
Document Type and Number:
Japanese Patent JP2008306112
Kind Code:
A
Abstract:

To provide a magneto-resistance effect film which has high sensitivity and reduced temperature dependency, to provide a magnetic sensor using the same, and to provide a rotation angle detecting device.

A spin valve giant magneto-resistance effect film having a fixed layer having unidirectional magnetic anisotropy, a free layer whose magnetization direction rotates toward an external magnetic field, an intermediate layer sandwiched between the fixed layer and free layer, and a protective layer formed on the free layer, is characterized in that the fixed layer, intermediate layer, free layer, and protective layer are formed in this order on a base body, the fixed layer includes a first ferromagnetic layer of CoFe alloy and a second ferromagnetic layer of CoFe alloy, and a first nonmagnetic layer coupling the magnetization directions of the two ferromagnetic layers in antiparallel, and the two ferromagnetic layers of the fixed layer are equal in magnetization-film thickness product and the protective layer is a second nonmagnetic layer formed principally of Ru.


Inventors:
OKADA YASUYUKI
MITSUMATA CHIHARU
Application Number:
JP2007154001A
Publication Date:
December 18, 2008
Filing Date:
June 11, 2007
Export Citation:
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Assignee:
HITACHI METALS LTD
International Classes:
H01L43/08; G01D5/18
Domestic Patent References:
JP2006092649A2006-04-06
JP2006210794A2006-08-10
JP2001113418A2001-04-24
JP2002009368A2002-01-11
JP2006018862A2006-01-19
JP2006049436A2006-02-16
JP2005260226A2005-09-22
JP2003121197A2003-04-23
JP2000113418A2000-04-21