PURPOSE: To raise the operating ratio of the apparatus by processing wafers with the recipes for a plurality of specified different processings, counting the number of times of execution or execution time of the events or recipes and notifying the maintenance time when the counted value has reached the preset value.

CONSTITUTION: Each time when the specified event A is completed, it is counted up. When such count value n has reached the preset value B, a maintenance alarm is generated to notify the maintenance time to a worker. After it is notified, a vount value n of the controller counter is cleared to 0 by the confirming operation by the worker. The counting is then started again and the maintenance time is also notified in the similar manner. This can also be applied to the other events C, D,.... When the maintenance time is notified, the maintenance work of apparatus can be done. Thereby, since the maintenance check work by the worker can be reduced and maintenance can also be designated and set even for the different events, the operating ratio of the apparatus can be raised.