Title:
MANUFACTURE DEVICE AND METHOD FOR JIG FOR HEAT TREATMENT OF WAFER
Document Type and Number:
Japanese Patent JP3413316
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To dispense with a carbon jig and facilitate the set positioning of a groove rod and facilitate the setting of the height to the reference groove, by providing a chuck means to hold a plurality of groove rods in the specified position, between a roof retained downward and a bottom plate retained upward.
SOLUTION: An upper retaining jig 44 retains top plate 4 abutted against its bottom by a vacuum chuck and a lower retaining jig 58 retains a bottom plate 5 placed on its topside by a vacuum chuck. Upper chuck means 70a-70d are arranged on upper and lower two stages so that they may catch four pieces of groove rods 6a-6d adjoining one another without colliding against one another Lower chuck means 80a-80d are arranged on upper and lower two stages so that they may catch the groove rods 6a-6d adjoining one another without colliding against one another. The four groove rods 6a-6d are set in the upper chuck means 70a-70d and the lower chuck means 80a-80d, in condition that the bottoms contact with the tops of the lower retaining jigs 58.
Inventors:
Shinichi Ohkoshi
Yoshimasa Okuyama
Takeda Masatoshi
Yoshimasa Okuyama
Takeda Masatoshi
Application Number:
JP22673695A
Publication Date:
June 03, 2003
Filing Date:
September 04, 1995
Export Citation:
Assignee:
Yamagata Shinetsu Quartz Co., Ltd.
Shin-Etsu Quartz Products Co., Ltd.
Shin-Etsu Quartz Products Co., Ltd.
International Classes:
H01L21/673; H01L21/22; H01L21/68; (IPC1-7): H01L21/22; H01L21/68
Domestic Patent References:
| JP846009A |
Attorney, Agent or Firm:
Shoji Ishihara