Title:
MANUFACTURE OF ELASTIC SURFACE WAVE ELEMENT
Document Type and Number:
Japanese Patent JPH04215614
Kind Code:
A
Abstract:
PURPOSE:To form a flush-mount electrode with good accuracy to improve a resistance to electromigration by precisely machining the electrodes when a surface elastic wave element having the flush-mount electrode is manufactured. CONSTITUTION:A resist pattern 2 of the comb-type electrode is formed. Successively, a piezoelectric body substrate 1 is dry-etched using the resist pattern of the comb-type electrode as an etching mask, and grooves 3 of the comb-type electrode are formed on the piezoelectric body substrate 1. Then, the resist pattern 2 of the comb-type electrode and unnecessay chrome 4 vapor-deposited on the place except the grooves 3 are completely removed by lift-off. Thereafter, an electrode material, namely, Al (aluminum) 5 is accumulated in the grooves 3 by Al-CVD method.
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Inventors:
OGURI NOBUAKI
Application Number:
JP41096590A
Publication Date:
August 06, 1992
Filing Date:
December 14, 1990
Export Citation:
Assignee:
CANON KK
International Classes:
C23C16/20; G01J1/02; G02B6/12; G02F1/11; G02F1/29; G02F1/33; (IPC1-7): C23C16/20; G01J1/02; G02B6/12; G02F1/11; G02F1/29
Attorney, Agent or Firm:
Kato Kazuo