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Title:
MANUFACTURE OF HERMETICAL SEALING STEM
Document Type and Number:
Japanese Patent JPH04188653
Kind Code:
A
Abstract:

PURPOSE: To enable an oven to be lessened in electric power cost and shortened in time required for decrease or increase in temperature by a method wherein an insulated lead pin and a low melting point glass member are mounted on a stem base, and the stem is heated at a temperature of 450-600°C to seal up the through-hole of the stem board where the insulated lead is inserted with the low-melting glass member.

CONSTITUTION: A gold plating layer 14 is formed on a stem base 11 subjected to nickel electroplating and a nickel plating layer provided onto an insulated lead pin 12 and an earth lead pin 13. The stem base 11 is made to travel through a temperature zone of 450-600°C in a heating oven, whereby the insulated lead pin 12 provided in a through-hole is bonded to the stem base 11 through the intermediary of a soft lead glass layer 15 to seal up the through-hole. As mentioned above, glass sealing and brazing are carried out at the same time, so that the gold plating layer 14 is prevented from disappearing due to its thermal diffusion into a nickel plating layer and material, in result a stem excellent in connecting stability and solderability. By this setup, a sealing oven can be lessened in size and electric power cost and shortened in time required for an oven to decrease or increase in temperature.


Inventors:
YAMADA TAKUJI
KOMATSUBARA YUKIO
UEDA YUJI
YAMADA MASAHIRO
Application Number:
JP31340790A
Publication Date:
July 07, 1992
Filing Date:
November 19, 1990
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
H01L23/12; (IPC1-7): H01L23/12
Attorney, Agent or Firm:
Saichi Suyama



 
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