Title:
MANUFACTURE OF ION CONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JP2521875
Kind Code:
B2
Abstract:
PURPOSE: To provide a manufacturing method of an ion conductor device by which excellent element characteristics are realized by combining a thick film electrode and a thin film ion conductor with each other.
CONSTITUTION: A Pt anode electrode 2 is formed on an insulating board 1 by a printing method, and after carrying out surface treatment to impregnate organic resin 3 from the side where the anode electrode 2 is formed, an ion conductor thin film 4 is formed on it by a sputtering method, and a Pt cathode electrode 5 is also formed by the printing method, and it is baked. Thereby, the Pt anode electrode 2, the cathode electrode 5 and the ion conductor thin film 4 are sintered, and at the same time, the organic resin 3 is transformed into cracked gas, and is made to disappear so that an excellent joining structure of the anode electrode, the ion conductor thin film and the cathode electrode can be obtained.
Inventors:
KAJIMA TAKAFUMI
NAKAMURA KATSUAKI
YADORI NAOJI
ISHIBASHI ATSUNARI
KATO YOSHINORI
NAKAMURA KATSUAKI
YADORI NAOJI
ISHIBASHI ATSUNARI
KATO YOSHINORI
Application Number:
JP7516093A
Publication Date:
August 07, 1996
Filing Date:
March 09, 1993
Export Citation:
Assignee:
FUJIKURA KK
CHIKYU KANKYO SANGYO GIJUTSU KENKYU KIKO
CHIKYU KANKYO SANGYO GIJUTSU KENKYU KIKO
International Classes:
G01N27/41; (IPC1-7): G01N27/41
Domestic Patent References:
| JP62144063A | ||||
| JP2170043A | ||||
| JP4164245A |
Attorney, Agent or Firm:
Itami Masaru
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