Title:
MANUFACTURE OF LAMINATED PIEZOELECTRIC ACTUATOR ELEMENT
Document Type and Number:
Japanese Patent JPH01107583
Kind Code:
A
Abstract:
PURPOSE:To manufacture a piezoelectric actuator element characterized by excellent productivity, economy and reliability, by providing electrical connection with inner electrode layers through slit groups. CONSTITUTION:A specified number of conductive tapes 2 are laminated on one or both surfaces of a thin plate 11 of piezoelectric ceramics. The device is baked, and the laminated body of the piezoelectric ceramics, in which inner electrode layers 12 are embedded, is formed. An insulating layer is formed on the end surface of the laminated body, where the inner electrode layer is exposed. A plurality of slits are formed on insulating layers 13A and 13B so that the slits are brought into contact with the inner electrodes 12 at every other layer. Thus slit groups 14A and 14B are formed. Outer electrodes 15A and 15B are formed so that they are electrically connected to the inner electrode layers 12 through the slit groups 14A and 14B. Thus the formation of the inner electrode layers and the junction of the piezoelectric ceramics by way of the conductive tapes are performed at the same time. The productivity and the economy in manufacturing of an actuator element are enhanced. Mutual contact of the outer electrodes is eliminated. Thus, the reliability of the element is improved.
Inventors:
MATSUMOTO HIROZO
Application Number:
JP26510587A
Publication Date:
April 25, 1989
Filing Date:
October 20, 1987
Export Citation:
Assignee:
FUJI ELECTRIC CO LTD
International Classes:
H01L41/09; H01L41/08; H01L41/083; (IPC1-7): H01L41/08
Attorney, Agent or Firm:
Iwao Yamaguchi