PURPOSE: To manufacture a magnetic thin film containing Pt, Mn, and Sb, excellent in magneto-optical effects, and used for photomagnetic recording, by simultaneously evaporating individual evaporation sources containing Pt, Mn, and Sb, respectively, to under go film formation on a substrate.
CONSTITUTION: A Pt target 11, an Mn target 12, and a Sb target 13 are separately disposed in a chamber (not shown in fig.), and further inclined by about 30° so that they are focused on the position of a quartz glass substrate 18. Permanent magnets (not shown in fig.) are provided to the lower parts of the targets 11W13, respectively, so as to form parallel magnetic fields 17 on the surfaces. Then, the inside of the above chamber is filled with a low-pressure atmosphere of Ar gas, where electric powers properly controlled by means of individual DC power sources 14W16 are impressed, respectively, on the targets 11W13, so that Pt, Mn, and Sb are severally evaporated at practically equal velocities by means of ion bombardment by magnetron sputtering. Further, the above substrate 18 is heated up to ≥about 200°C and held at that temp. In this way, a crystalline thin film consisting of Pt, Mn, and Sb in a ratio of approximately 1:1:1 and unidirectionally oriented can be formed on the substrate 18.
MITSUYU TSUNEO
YAMAZAKI OSAMU
