Title:
MANUFACTURE OF MULTIELEMENT TYPE INFRARED SENSOR
Document Type and Number:
Japanese Patent JPH04284678
Kind Code:
A
Abstract:
PURPOSE:To provide the manufacturing method of an infrared sensor to show high sensitivity characteristics over a wide wavelength range. CONSTITUTION:The sides of the surfaces on one side of the surfaces of multiple semiconductor crystals 4, which are accompanied by segregation in a crystal growth direction, are two-dimensionally removed obliquely to the surfaces perpendicular to the crystal growth direction, the surfaces on one side of said crysrtals 4 are bonded on a support substrate 5 and after the sides of the other surfaces of said crystals 4 are two-dimensionally removed in such a way as to become parallel with the surfaces on one side of said crystals 4, parts other than parts which are used as a plurality of elements are removed. Thereby, a multielement type infrared sensor is manufactured.
Inventors:
ITO MICHIHARU
Application Number:
JP7220791A
Publication Date:
October 09, 1992
Filing Date:
March 13, 1991
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
H01L21/208; H01L27/14; H01L31/10; (IPC1-7): H01L21/208; H01L27/14; H01L31/10
Attorney, Agent or Firm:
Akira Matsumoto
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