PURPOSE: To obtain a manufacturing method capable of easily manufacturing a multilayered ceramic capacitor of small-sized large capacitance wherein a green sheet can be easily thinned, its management is facilitated, and the generation of cracks and delamination is restrained.
CONSTITUTION: A metal film 2 turning to an inner electrode layer is formed on a base film 1 by evaporating nickel, and a ceramic dielectric layer 3 is formed on the metal film 2, thereby forming a green sheet. The base film is peeled after a next geen sheet is stacked and compression-bonded on the surface of the green sheet wherein the base film 1 is peeled. A specific number of green sheets are laminated by repeating each stacking, compression bonding, and peeling. By the above manufacturing method, the surface is kept flat when the green sheet is thinned, and delamination and cracks are not generated because the green sheets are carried and laminated in the state that the green sheets are retained by the base films. Hence the lamination of many green sheets is possible and large capacitance can be obtained.
KATO JUNICHI
NISHIMURA TSUTOMU
OKANO KAZUYUKI
KAMATA TAKEKI
SUZUKI TOSHIYUKI
ISHIKAWA MARIKO
