Title:
MANUFACTURE OF OPTICAL WAVEGUIDE
Document Type and Number:
Japanese Patent JPH05134123
Kind Code:
A
Abstract:
PURPOSE:To provide a manufacture of an optical waveguide in which axial difference at the time of non-aligning connection with an optical fiber, is small. CONSTITUTION:In manufacture of an optical waveguide, in which a lower clad layer 2 of desired thickness, an optical waveguide 5 of desired height, and an upper clad layer 6 of desired thickness for burying the optical waveguide, are formed in order by flame deposition on a substrate 1, the optical waveguide is manufactured in two steps, i.e., the thickness of the lower clad layer 2 is measured after a lower clad layer part 2a that is thinner than desired is formed, and then a lower clad layer 2b is formed into the remaining thickness. Since the amount of variation in the thickness of the core layer formed on the remaining lower clad layer 2 becomes small, dispersion in the distance between the center of the optical waveguide 5 and the substrate surface will thus be small.
Inventors:
YANAGAWA HISAHARU
SHIMIZU TAKEO
NAKAMURA SHIRO
SHIMIZU TAKEO
NAKAMURA SHIRO
Application Number:
JP29680491A
Publication Date:
May 28, 1993
Filing Date:
November 13, 1991
Export Citation:
Assignee:
FURUKAWA ELECTRIC CO LTD
International Classes:
G02B6/13; G02B6/12; (IPC1-7): G02B6/12
Attorney, Agent or Firm:
Koji Nagato