Title:
MANUFACTURE OF PELLICLE
Document Type and Number:
Japanese Patent JP3240261
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To make it possible to cut off an unnecessary part of the pellicle film without any occurrence of dust and to clean the pellicle film and the pellicle frame of stains and dust by attaching the pellicle film to the pellicle frame and heating the pellicle frame along the outer circumference of the pellicle film to be stuck and cutting off its unnecessary part.
SOLUTION: The pellicle frame 4 coated with an adhesive 3 is stuck to the pellicle film 2 attached to an outer frame 1, and the outer circumference of the frame 4 attached to the film 2 is irradiated with laser beams 6 from a laser 5, while moving the frame 4 or moving the emitting member of the laser beams 6 along the circumference. At that time, the frame 4 absorbs the laser beams 6 and heat is generated and the adhesive 3 and the pellicle film 2 are heated at the film 2 are soft, and the pellicle film 2 is sharply cut along the stuck end part 7 in which stress is concentrated as if it is pressed with a heated die cutter.
Inventors:
Yoshihiko Nagata
Application Number:
JP19583596A
Publication Date:
December 17, 2001
Filing Date:
July 25, 1996
Export Citation:
Assignee:
Shin-Etsu Chemical Co., Ltd.
International Classes:
G03F1/62; H01L21/027; (IPC1-7): G03F1/14; H01L21/027
Domestic Patent References:
| JP5323584A | ||||
| JP8114912A | ||||
| JP6266098A | ||||
| JP477739A |
Attorney, Agent or Firm:
Ryoichi Yamamoto (1 person outside)
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