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Patent Searching and Data


Title:
MANUFACTURE OF SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JPS62178308
Kind Code:
A
Inventors:
ITO SHUZO
Application Number:
JP2088486A
Publication Date:
August 05, 1987
Filing Date:
January 31, 1986
Export Citation:
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Assignee:
ROHM CO LTD
International Classes:
H01L21/301; B28D5/00; H01L21/78; (IPC1-7): B28D5/00; H01L21/78
Domestic Patent References:
JPS55162242A1980-12-17
JPS564246A1981-01-17
Attorney, Agent or Firm:
Koji Onishi



 
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