Title:
MANUFACTURE OF SEMICONDUCTOR PRESSURE TRANSDUCER
Document Type and Number:
Japanese Patent JPS53105184
Kind Code:
A
Abstract:
PURPOSE:To improve the linearity of resistance variation due to the pressure and of off-set voltage variation due to temperature, by using a strong-acid- based etching liquid and strongalkali-based etching liquid together so as to form surfaces.
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Inventors:
SHIROMIZU SHIYUNJI
KIMIJIMA SUSUMU
SATOU SHIYOUZOU
KIMIJIMA SUSUMU
SATOU SHIYOUZOU
Application Number:
JP1872077A
Publication Date:
September 13, 1978
Filing Date:
February 24, 1977
Export Citation:
Assignee:
TOKYO SHIBAURA ELECTRIC CO
International Classes:
G01L9/04; G01L9/00; H01L21/302; H01L21/308; H01L29/84; H01L45/00; (IPC1-7): G01L9/00; H01L21/302; H01L45/00