Title:
MANUFACTURE OF SLIGHTLY HALOGENATED SILANE OR MONOSILANE
Document Type and Number:
Japanese Patent JPS6071513
Kind Code:
A
Abstract:
PURPOSE: To manufacture inexpensively and easily a slightly halogenated silane or monosilane by bringing a halogenosilane into contact with a phosphoric ester compound.
CONSTITUTION: Trichlorosilane, dichlorosilane or monochlorosilane is used as a halogenosilane as a starting material. Bromosilane, fluorosilane or iodosilane may be used. Monophosphoric ester, diphosphoric ester or triphosphoric ester is used as a phosphoric ester compound. The weight ratio of the phosphoric ester to the halogenosilane used is 1/500W1/2,000, and a reaction is caused at 25W 350°C, especially 50W120°C.
Inventors:
OZAKI YASUTAKA
TAKADA TOSHIYUKI
HIRASHIMA TAKEYUKI
TAKADA TOSHIYUKI
HIRASHIMA TAKEYUKI
Application Number:
JP17636483A
Publication Date:
April 23, 1985
Filing Date:
September 26, 1983
Export Citation:
Assignee:
TOKUYAMA SODA KK
International Classes:
C01B33/04; B01J31/00; B01J31/02; C01B33/107; (IPC1-7): B01J31/02; C01B33/04; C01B33/107