Title:
MOS型半導体装置の製造方法
Document Type and Number:
Japanese Patent JP4857827
Kind Code:
B2
Inventors:
Akihiko Oi
Application Number:
JP2006064232A
Publication Date:
January 18, 2012
Filing Date:
March 09, 2006
Export Citation:
Assignee:
Fuji Electric Co., Ltd.
International Classes:
H01L29/78; H01L21/28; H01L21/336; H01L29/41; H01L29/423; H01L29/49
Domestic Patent References:
| JP2006510217A | ||||
| JP3211885A | ||||
| JP2004031959A | ||||
| JP7078977A | ||||
| JP9237894A | ||||
| JP2006510214A | ||||
| JP11031815A | ||||
| JP2001085686A | ||||
| JP7326755A |
Foreign References:
| WO2004055884A1 | ||||
| WO2004055882A1 |
Attorney, Agent or Firm:
Yoichi Matsumoto