To provide a manufacturing method of a color solid-state image pickup element having a coloring pixel filter of a lens integral structure excellent in shape precision and positioning precision.

A green pixel filter part 21B and a red pixel filter part 21R are formed in prescribed positions of a semiconductor substrate 10 where photoelectric conversion elements 11 are installed. A blue photosensitive resin layer 41 is formed on the green pixel filter part 21B, the red pixel filter part 31R and the semiconductor substrate 10. Pattern exposure and development are performed by using an exposure control mask 80C. Blue pixel filter parts 41B and blue lens matrixes 41c are formed, and etch-back is performed by dry etching. Thus, the color solid-state image pickup element where the coloring pixel filter of the lens integral structure is formed is obtained.