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Title:
ダイシングシート機能付きダイアタッチフィルム及びそれを用いた半導体装置の製造方法
Document Type and Number:
Japanese Patent JP4661889
Kind Code:
B2
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Inventors:
Sasaki Akira
Nakagawa Daisuke
Application Number:
JP2008067253A
Publication Date:
March 30, 2011
Filing Date:
March 17, 2008
Export Citation:
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Assignee:
Sumitomo Bakelite Co., Ltd.
International Classes:
H01L21/52; C09J7/02; C09J133/06; C09J163/00; H01L21/301
Domestic Patent References:
JP2003142505A
JP9266183A
JP2004281751A
JP3152942A



 
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