Title:
電子デバイスの製造方法
Document Type and Number:
Japanese Patent JP5895033
Kind Code:
B2
Inventors:
Shinji Kuwahara
Koichi Saito
Kiyono Junji
Hirotaka Endo
Hisamoto Yoshihiro
Eiji Nakagome
Hideki Takao
Tomoaki Hirose
Lee Hui
Umeya Yuji
Koichi Saito
Kiyono Junji
Hirotaka Endo
Hisamoto Yoshihiro
Eiji Nakagome
Hideki Takao
Tomoaki Hirose
Lee Hui
Umeya Yuji
Application Number:
JP2014155211A
Publication Date:
March 30, 2016
Filing Date:
July 30, 2014
Export Citation:
Assignee:
Kato Electric Co., Ltd.
International Classes:
H01L23/50; H01L21/50
Domestic Patent References:
| JP2011091194A |
Attorney, Agent or Firm:
Izumidori
Mochizuki Yoshitoki
Mochizuki Yoshitoki