Title:
保持装置の製造方法
Document Type and Number:
Japanese Patent JP6730876
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To improve uniformity of a temperature distribution of a first surface of a retainer, by improving dimensional accuracy of a resistive heating element in a surface direction and a thickness direction, while reducing a use amount of photosensitive metallized paste.SOLUTION: A manufacturing method for a retainer includes: a print step of forming a provisional pattern of photosensitive metallized paste on a predetermined member, by performing screen printing by using the photosensitive metallized paste that is a formation material of a resistive heating element; an information acquisition step of acquiring dimensional information related to dimensions of the provisional pattern formed; a removal step of forming a main pattern of the photosensitive metallized paste by exposing and developing the provisional pattern in an exposure form set based on the dimensional information, thereby removing at least a part of the provisional pattern; and a calcination step of forming a resistive heating element by calcinating the main pattern.SELECTED DRAWING: Figure 5
Inventors:
Shota Saito
Application Number:
JP2016152506A
Publication Date:
July 29, 2020
Filing Date:
August 03, 2016
Export Citation:
Assignee:
Nippon Special Ceramics Co., Ltd.
International Classes:
H01L21/683; H05B3/20; H05B3/74
Domestic Patent References:
| JP2016072567A | ||||
| JP2004296445A | ||||
| JP2008205445A |
Foreign References:
| WO2002003434A1 |
Attorney, Agent or Firm:
Patent Business Corporation Alpha International Patent Office