To provide a manufacturing method of a joining body of a hydrogen separating membrane-an electrolyte membrane which can improve tightly-adhering strength between a hydrogen membrane and an electrolyte membrane and to provide a fuel battery manufacturing method and a deposition system.
The manufacturing method of the joining body of a hydrogen separating membrane-an electrolyte membrane includes, under an ambient atmosphere containing oxygen, a deposition process which forms by a vapor-phase deposition method an oxide-type electrolyte membrane having a proton conductivity on one surface of a hydrogen separating membrane (10) with hydrogen permeability. In the deposition process, oxygen partial pressure of an ambient atmosphere to which a deposition amount of the electrolyte membrane and one surface of the hydrogen separating membrane (10) are exposed is alternatively increased and decreased. When decreasing the deposition amount of the electrolyte membrane, the oxygen partial pressure is increased, while increasing the same, the oxygen partial pressure is decreased. According to the manufacturing method of the present invention, the tightly-adhering strength between the hydrogen separating membrane (10) and the electrolyte membrane can be improved.
Toshiyuki Hatta
High Yoshitaka Hayashi