To manufacture magnetic recording media using a non-conductive disk substrate with high mass productivity.
The method is the manufacturing method of the magnetic recording media mounted in hard disk drives, the method is provided with: a preparation step in which a non-conductive disk substrate 12 is prepared; a holding step in which the disk substrate 12 is held by the holding part 204 using a substrate adapter 102 provided with a mount part 202 being rotatable, a holding part 204 provided at the mount part 202, and a terminal 206 for applying bias in a state in which the terminal 206 for applying bias is not contacted to the disk substrate 12; a first film depositing step in which a conductive film is deposited on the disk substrate 12; a contact step in which the terminal 206 for applying bias is contacted to the disk substrate 12 by rotating the mount part 202; and a second film depositing step in which depositing a next layer applying bias voltage through the terminal 206 for applying bias.
HOYA MAGNETICS SINGAPORE PTE
JPH097174A | 1997-01-10 | |||
JP2000339784A | 2000-12-08 | |||
JP2005056535A | 2005-03-03 |