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Title:
MANUFACTURING METHOD OF MAGNETIC RECORDING MEDIUM, AND SUBSTRATE ADAPTER
Document Type and Number:
Japanese Patent JP2007026516
Kind Code:
A
Abstract:

To manufacture magnetic recording media using a non-conductive disk substrate with high mass productivity.

The method is the manufacturing method of the magnetic recording media mounted in hard disk drives, the method is provided with: a preparation step in which a non-conductive disk substrate 12 is prepared; a holding step in which the disk substrate 12 is held by the holding part 204 using a substrate adapter 102 provided with a mount part 202 being rotatable, a holding part 204 provided at the mount part 202, and a terminal 206 for applying bias in a state in which the terminal 206 for applying bias is not contacted to the disk substrate 12; a first film depositing step in which a conductive film is deposited on the disk substrate 12; a contact step in which the terminal 206 for applying bias is contacted to the disk substrate 12 by rotating the mount part 202; and a second film depositing step in which depositing a next layer applying bias voltage through the terminal 206 for applying bias.


Inventors:
ISHIBASHI SHINICHI
Application Number:
JP2005205759A
Publication Date:
February 01, 2007
Filing Date:
July 14, 2005
Export Citation:
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Assignee:
HOYA CORP
HOYA MAGNETICS SINGAPORE PTE
International Classes:
G11B5/851; C23C14/06; C23C14/34
Domestic Patent References:
JPH097174A1997-01-10
JP2000339784A2000-12-08
JP2005056535A2005-03-03
Attorney, Agent or Firm:
Yasuo Fujimura