To provide a method of manufacturing an organic electroluminescent panel wherein a liquid material containing an organic luminescent material is atomized for deposition, with high use efficiency of the material, and allowing deposition with a uniform film thickness distribution.
The method of manufacturing the organic electroluminescent panel composed of an organic compound layer containing at least a first electrode and a luminescent layer on a substrate S and a second layer, is a method to obtain the organic compound layer by atomizing liquid containing the organic compound and depositing it on the substrate. Mist generating devices 101, 201 to atomize the liquid containing the organic compound layer by ultrasonic vibration, a filling and pressurizing chamber 2 pressurizing an atmosphere by filling mist in it, and a slit passage 3 to pass the mist from the filling and pressurizing chamber 2 are provided, the deposited substrate S is disposed in the slit passage 3, and the mist is deposited on the substrate to form the organic compound layer.
COPYRIGHT: (C)2009,JPO&INPIT
Kazuo Genda
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Yasuo Nara
Naoki Ito
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