Title:
ペリクル枠およびペリクル枠の製造方法
Document Type and Number:
Japanese Patent JP6526588
Kind Code:
B2
Inventors:
Yukihiro Kimura
Application Number:
JP2016046601A
Publication Date:
June 05, 2019
Filing Date:
March 10, 2016
Export Citation:
Assignee:
Nippon Special Ceramics Co., Ltd.
International Classes:
G03F1/64; B23H7/02; B23H9/00
Domestic Patent References:
| JP2010262284A | ||||
| JP11065092A | ||||
| JP2012053305A | ||||
| JP1229926A | ||||
| JP5077114A | ||||
| JP10048811A | ||||
| JP2010102357A |
Foreign References:
| US20030136512 |
Attorney, Agent or Firm:
Meisei International Patent Office