Title:
Manufacturing method of semiconductor device
Document Type and Number:
Japanese Patent JP6099553
Kind Code:
B2
Inventors:
Go Inoue
Hitoshi Sakane
Shoga Masaoka
Hitoshi Sakane
Shoga Masaoka
Application Number:
JP2013261442A
Publication Date:
March 22, 2017
Filing Date:
December 18, 2013
Export Citation:
Assignee:
Sumiju Test Co., Ltd.
International Classes:
H01L21/265
Domestic Patent References:
| JP2000232212A | ||||
| JP2013222893A | ||||
| JP9121052A | ||||
| JP2011049300A | ||||
| JP10199894A | ||||
| JP2008244042A | ||||
| JP2000123778A | ||||
| JP1162368A | ||||
| JP5326693A |
Foreign References:
| WO2013157183A1 |
Attorney, Agent or Firm:
Sakaki Morishita
Yusuke Murata
Tomoyuki Miki
Tomisho Teruo
Yusuke Murata
Tomoyuki Miki
Tomisho Teruo