Title:
半導体光集積素子の製造方法
Document Type and Number:
Japanese Patent JP4058245
Kind Code:
B2
Inventors:
Landlord akira
Hiroshi Sato
Kazunori Shinoda
Hiroshi Sato
Kazunori Shinoda
Application Number:
JP2001045947A
Publication Date:
March 05, 2008
Filing Date:
February 22, 2001
Export Citation:
Assignee:
Japan Opnext Co., Ltd.
International Classes:
G02B6/122; G02B6/13; H01S5/026; H01S5/50
Domestic Patent References:
| JP9199794A | ||||
| JP5251812A | ||||
| JP11087844A |
Attorney, Agent or Firm:
Manabu Inoue
Katsuo Ogawa
Katsuo Ogawa