Title:
センサーアレイ及び圧力センサーの製造方法
Document Type and Number:
Japanese Patent JP5413131
Kind Code:
B2
Inventors:
Hironori Suzuki
Application Number:
JP2009252512A
Publication Date:
February 12, 2014
Filing Date:
November 03, 2009
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
G01L1/02; G01L5/00; H04R17/00; H04R31/00
Domestic Patent References:
| JP2007192648A | ||||
| JP2001352111A | ||||
| JP9092896A | ||||
| JP62123326A | ||||
| JP60090696A | ||||
| JP6132545A | ||||
| JP2005245938A |
Attorney, Agent or Firm:
Masahiko Ueyanagi
Osamu Suzawa
Kazuhiko Miyasaka
Osamu Suzawa
Kazuhiko Miyasaka