Title:
MANUFACTURING METHOD OF STACKED POLISHING PAD
Document Type and Number:
Japanese Patent JP2007061929
Kind Code:
A
Abstract:
To provide a manufacturing method of a stacked polishing pad, which includes a smaller number of manufacturing processes and excellent productivity.
This manufacturing method of a stacked polishing pad includes processes of: preparing bubble dispersed urethane composition 14 by mechanical froth method; delivering a cushion layer 9 and simultaneously continuously discharging bubble dispersed urethane composition thereon; a adjusting the thickness to be uniform and also hardening the bubble dispersed composition to form a polishing layer made of polyurethane foamed body and manufacture a long stacked sheet 17; and cutting 19 the long stacked sheet.
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Inventors:
HIROSE JUNJI
DOURA MASATO
DOURA MASATO
Application Number:
JP2005249056A
Publication Date:
March 15, 2007
Filing Date:
August 30, 2005
Export Citation:
Assignee:
TOYO TIRE & RUBBER CO
International Classes:
B24B37/20; B24B37/24; H01L21/304
Domestic Patent References:
| JPS61187657A | 1986-08-21 | |||
| JP2004042244A | 2004-02-12 | |||
| JP2004524676A | 2004-08-12 |
Attorney, Agent or Firm:
Takao Suzuki
Koichi Kajisaki
Yuzo Ozaki
Toshihiko Taniguchi
Koichi Kajisaki
Yuzo Ozaki
Toshihiko Taniguchi