Title:
MASS SPECTROMETER
Document Type and Number:
Japanese Patent JP2020145100
Kind Code:
A
Abstract:
To observe the surface of a sample with high optical resolution in a mass spectrometer.SOLUTION: A mass spectrometer includes: a plate-shaped extraction electrode 19 that includes a sample stage 14 provided with a sample arrangement surface and an opening 20 through which ions pass, is provided at a position facing the sample arrangement surface, and extracts ions generated from a sample 12 arranged on the sample arrangement surface in a direction orthogonal to the sample arrangement surface; ion separation/detection units 23 and 24 that separate and detect the ions extracted by the extraction electrode 19 according to the mass-to-charge ratio; and a camera 38 that photographs the surface of the sample 12, wherein the extraction electrode 19 transmits visible light, and an optical path of light emitted from the sample 12 and incident on the camera 38 passes through a region of the extraction electrode 19 other than the opening 20.SELECTED DRAWING: Figure 1
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Inventors:
KAWABATA SHINICHIRO
Application Number:
JP2019041598A
Publication Date:
September 10, 2020
Filing Date:
March 07, 2019
Export Citation:
Assignee:
SHIMADZU CORP
International Classes:
H01J49/06; G01N27/62; H01J49/16
Attorney, Agent or Firm:
Kyoto International Patent Office