Title:
MATERIAL SYNTHETIC CONTROL SYSTEM
Document Type and Number:
Japanese Patent JPH03171301
Kind Code:
A
Abstract:
PURPOSE:To control the material synthesization at a microscopic level by evaluating microscopically the synthesization performed at the atomic/molecular levels and estimating the physical properties in real time based on the result of evaluation. CONSTITUTION:A means 11 is provided to synthesize a material showing the optional physical properties together with a means 17 which observes and evaluates in real time the property of a material noted at present, and a simulation means 18 which checks logically the physical properties of a relevant system based on a proper logical model. Then a material is synthesized at a speed lower than the simulation and at the same time the simulation is carried out with the information obtained by the means 17 used as the starting value. The result of the synthesization if carried on under the conditions is estimated together with a way of correction presumed for the result of estimation. Thus the synthetic conditions are controlled in a feedback system. As a result, the synthesizing process is optimized so as to produce the satisfactory materials with highest efficiency and to develop a new material.
Inventors:
ITO SATOSHI
Application Number:
JP31139589A
Publication Date:
July 24, 1991
Filing Date:
November 30, 1989
Export Citation:
Assignee:
TOSHIBA CORP
International Classes:
G01N21/65; C23C14/54; C23C16/52; G01N21/35; G01N21/3563; G05B13/02; G05B13/04; H01L21/00; H01L21/02; (IPC1-7): C23C14/54; C23C16/52; G01N21/35; G01N21/65; G05B13/02; G05B13/04
Attorney, Agent or Firm:
Takehiko Suzue (3 outside)