Title:
MATRIX ARRAY DEVICE AND SUBSTRATE FOR MATRIX ARRAY DEVICE
Document Type and Number:
Japanese Patent JP2001013187
Kind Code:
A
Abstract:
To provide a substrate for a matrix array device and the matrix array device allowing effective and accurate inspection of variation of a transistor characteristic.
This substrate 100 for a matrix array device has inspection circuit parts 104 each disposed near an area formed with at least one of a gate line drive circuit part 102 and a signal line drive circuit part 103 over a nearly same length as one side of the drive circuit 102 or 103 or above. By measuring an oscillation frequency of the inspection circuit part 14, variety of a transistor characteristic different in each the area can be easily and accurately detected on the substrate 100 for the matrix array device.
Inventors:
SEIKI MASAHIRO
MATSUNAGA IKUO
WATANABE RYOICHI
WATANABE MANABU
MATSUNAGA IKUO
WATANABE RYOICHI
WATANABE MANABU
Application Number:
JP18681099A
Publication Date:
January 19, 2001
Filing Date:
June 30, 1999
Export Citation:
Assignee:
TOSHIBA CORP
International Classes:
G01R31/00; G01R31/28; G02F1/13; G02F1/136; G02F1/1365; G02F1/1368; G09F9/00; G09F9/30; (IPC1-7): G01R31/00; G01R31/28; G02F1/13; G02F1/1365; G09F9/00; G09F9/30
Attorney, Agent or Firm:
Kazuo Sato (3 others)
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