Title:
計測検査装置
Document Type and Number:
Japanese Patent JP6995648
Kind Code:
B2
Abstract:
A low noise blanking unit corresponds to a wide range of acceleration voltages (from several times higher than related voltages to low acceleration voltages) of an electron beam. A blanking unit of the measurement and inspection device includes a blanking control circuit, in which (i) an upper and a lower blanking electrodes are arranged in the irradiation direction of an electron beam; electrodes on the reverse sides of two opposing electrodes in each of the blanking electrodes arranged in the same direction are connected with the ground, (ii) when blanking is ON, positive voltages are output to remaining electrodes of the upper blanking electrode and negative voltages are output to remaining electrodes of the lower blanking electrode, and (iii) when the blanking is OFF, the same ground reference signal is output to the remaining electrodes of the upper blanking electrode and to the remaining electrodes of the lower blanking electrode.
Inventors:
Lee Wen
Shinichi Murakami
Hiroyuki Takahashi
Yuko Sasa
Yamazaki Minoru
Kawano Gen
Shinichi Murakami
Hiroyuki Takahashi
Yuko Sasa
Yamazaki Minoru
Kawano Gen
Application Number:
JP2018013509A
Publication Date:
January 14, 2022
Filing Date:
January 30, 2018
Export Citation:
Assignee:
Hitachi High-Tech Co., Ltd.
International Classes:
H01J37/147; H01L21/66
Domestic Patent References:
| JP2000133183A | ||||
| JP8241689A |
Foreign References:
| US20130193341 |
Attorney, Agent or Firm:
Aoritsu patent business corporation