To provide a mechanical quantity sensor which is free from a drop in a process yield even if a piezoelectric substrate is thinned, excellent in productivity, highly sensitive, compact and capable of wireless communication, and its manufacturing method.
The mechanical quantity sensor 500 is structured, which includes a SAW element 504 formed on a piezoelectric single-crystal substrate 501 and having an interdigital electrode 502 and a reflector 503, a non-piezoelectric single-crystal substrate 505 having a hole 508 through a principal plane for supporting the substrate 501 around the hole 508 to have a surface elastic wave transmission part of the element 504 located on the hole 508, an antenna 506 formed on the substrate 505, and a matching circuit 507 for connecting the antenna 506 to the electrode 502.
COPYRIGHT: (C)2007,JPO&INPIT
Kazumi Tanaka
Jun Sasaki
Chieko Fujiwara
Yoshiaki Ikeda
| JP2005101961A | ||||
| JP4109341U | ||||
| JP55124035A | ||||
| JP2000121660A | ||||
| JP2004343359A | ||||
| JP61207942A | ||||
| JP6067829A |