Title:
MECHANISM AND METHOD FOR TAKING OUT SUBSTRATE
Document Type and Number:
Japanese Patent JP3953259
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a mechanism for taking out a base plate, and a method for taking out the base plate, capable of mounting the plate at a prescribed position of a support member, when taking out the plate from a container containing the plate and not contacting the plate with the container and a method for taking out the plate.
SOLUTION: The mechanism for taking out the base plate from the container C, containing the plate G comprises the support member 41 for supporting the plate, a moving means 51 for moving the member 41, a base plate detecting means 50 provided at the member 41 for detecting the attitude of the plate, and a control means 52 for controlling the attitude of the member 41, so as to mount the plate at a suitable position of the member 41 inserted into the container C, based on detecting of the means 50 and controlling the attitude of the member 41 so as to become a suitable position for the plate G to the container C on the member 41, based on the detection information of the means 50, after the plate G is mounted on the member 41.
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Inventors:
Kiyohisa Tateyama
Tatsuya Iwasaki
Tatsuya Iwasaki
Application Number:
JP2000169192A
Publication Date:
August 08, 2007
Filing Date:
June 06, 2000
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
G02F1/13; H01L21/68; B65G49/06; B65G49/07; G09F9/00; (IPC1-7): H01L21/68; B65G49/06; B65G49/07; G02F1/13; G09F9/00
Domestic Patent References:
| JP9134944A | ||||
| JP11106044A |
Attorney, Agent or Firm:
Hiroshi Takayama