Title:
MELTING OF ROD-LIKE POLYCRYSTAL SILCON AND APPARATUS THEREFOR
Document Type and Number:
Japanese Patent JP3693704
Kind Code:
B2
Abstract:
PURPOSE: To provide a method for melting a rod-like polycrystal silicon capable of automatically and accurately carrying out feeding and pulling up of a rod-like raw material into a crucible in recharging, and capable of obtaining a melt of a definite level.
CONSTITUTION: A road cell-weight measuring device 7 for converting the change in weight accompanied with melting of a rod-like raw material 4 in recharging to analogue voltage and outputting it is attached to the upper tip of a lifting and lowering shaft 6 and a melted weight-judging device 8 for receiving the outputted analogue voltage value and carrying out liquid face contact judgment, dipping amount judgment and melting-finishing judgment is provided.
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| JP3770013 | SINGLE CRYSTAL PULLING METHOD |
Inventors:
Taizo Miyamoto
Hiraishi Yoshinobu
Teruhiko Uchiyama
Tamura Masatoshi
Hiraishi Yoshinobu
Teruhiko Uchiyama
Tamura Masatoshi
Application Number:
JP14380295A
Publication Date:
September 07, 2005
Filing Date:
May 02, 1995
Export Citation:
Assignee:
Komatsu Electronic Metal Co., Ltd.
International Classes:
C30B15/24; C30B29/06; H01L21/208; (IPC1-7): C30B15/24; C30B29/06; H01L21/208
Domestic Patent References:
| JP2188487A | ||||
| JP3012385A | ||||
| JP61026596A | ||||
| JP62021790A |
Attorney, Agent or Firm:
Takahisa Kimura
Yoshiyuki Obata
Yukihiro Tsuda
Akira Eto
Yoshiyuki Obata
Yukihiro Tsuda
Akira Eto
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