METALLIC MOLD FOR WAVEGUIDE AND METHOD OF MANUFACTURING WAVEGUIDE

Japanese Patent JP2004133300

A

To provide a metallic mold for a waveguide by which manufacturing cost is reduced, and also to provide a method of manufacturing the waveguide.

A photosensitive resin layer 11 is formed on a substrate, the photosensitive resin layer 11 is exposed to a synchrotron radiation SR using a mask M having a prescribed pattern and then developed. Metal is made to be deposited on a part where the photosensitive resin layer 11 is removed and a part where the photosensitive resin layer 11 is not exposed is removed to form the metal mold for the waveguide. The step for exposing the photosensitive resin layer 11 comprises a step wherein the synchrotron radiation SR is made incident at about 45° angle to the surface of the photosensitive resin layer 11 to expose the photosensitive resin layer 11 using the mask M. A mother stamper is formed by transferring the projecting and recessed shape of the the metal mold for the waveguide as a master stamper to the mother stamper and the projecting and recessed shape of the mother stamper is transferred to form the waveguide.

JP4113162	Optical waveguide and its manufacturing method
JPH0474728	PRODUCTION OF QUARTZ LIGHT-WAVEGUIDE AND APPARATUS THEREFOR
JP2001305367	OPTICAL PARTS, OPTICAL MODULE AND METHOD FOR FORMING OPTICAL PARTS

OTORII SUGURU
NOGAMI TAKESHI
TAI KAORI
HORIKOSHI HIROSHI
TAKAHASHI SHINGO
SATO SHUZO
KOMAI HISANORI

JP2002299292A

April 30, 2004

October 11, 2002

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SONY CORP

G02B6/13; G02B6/12; (IPC1-7): G02B6/13; G02B6/12

Takahisa Sato

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