Title:
金イオン及びフッ素イオンを含有する溶液を用いた金属ケイ化物の形成方法
Document Type and Number:
Japanese Patent JP6312713
Kind Code:
B2
Abstract:
This process essentially has applications in the manufacture of NAND memories and photovoltaic cells.
Inventors:
Mevelec, Vincent
Sir, dominique
Sir, dominique
Application Number:
JP2015558531A
Publication Date:
April 18, 2018
Filing Date:
February 21, 2014
Export Citation:
Assignee:
Avni
International Classes:
C23C18/34; C23C18/18; H01L31/04
Domestic Patent References:
| JP52066374A | ||||
| JP2010047790A | ||||
| JP2000319541A | ||||
| JP2012237060A | ||||
| JP2009049235A |
Foreign References:
| WO2009139366A1 | ||||
| US20040005468 |
Attorney, Agent or Firm:
Atomi International Patent Office