Title:
METHOD AND APPARATUS FOR CONTINUOUSLY PURIFYING AMMONIA GAS
Document Type and Number:
Japanese Patent JP3595301
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method for directly and continuously purifying low price crude ammonia gas for industrial applications having a purity of about 99.9% or recovered ammonia gas at a location where the ammonia is to be used into high purity ammonia gas having a purity of 99.999 to 99.9999% or higher that can be used in a semiconductor producing process, and to provide an apparatus therefor.
SOLUTION: In a process step A, the crude ammonia gas is introduced into a dehydrating tower (3) under a substantially room temperature filled with a barium oxide-based moisture removing agent to remove by reaction the moisture contained in the gas. In a process step B, the ammonia gas from which moisture is removed in the process step A is introduced into an intermediate reflux part (42) of a distillation column (4), liquefying the ammonia gas and separating low boiling point impurities at an upper condensation/cooling part (41). The liquefied material flows down to a lower storage part (43) to form the substantially high purity ammonia. Small amount of impurities contained in the stored liquid is removed by boiling at a lowest boiling/heating part (44).
Inventors:
Kenetsu Uemori
Toshiyuki Abe
Makoto Uchino
Shinichi Ando
Toshiyuki Abe
Makoto Uchino
Shinichi Ando
Application Number:
JP2001385797A
Publication Date:
December 02, 2004
Filing Date:
December 19, 2001
Export Citation:
Assignee:
Taiyo Toyo Oxygen Co., Ltd.
International Classes:
B01D53/26; B01D53/28; C01C1/02; (IPC1-7): C01C1/02; B01D53/26; B01D53/28
Domestic Patent References:
| JP2001348222A | ||||
| JP9142833A |
Attorney, Agent or Firm:
Seiro Oishi
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