Title:
METHOD AND APPARATUS FOR DETECTING DEFECT, AND INFRARED DETECTING METHOD AND APPARATUS
Document Type and Number:
Japanese Patent JP3229411
Kind Code:
B2
Abstract:
PURPOSE: To quickly and highly accurately detect the position of a shortcircuiting defect by switching an impressing voltage, a lens or the like depending on the heat generating state of a wiring, a defective part due to a current flowing in the shortcircuiting defect.
CONSTITUTION: A voltage of a power source 100 is impressed onto a thin film transistor substrate 4. If a shortcircuit is generated, a current flows in a course, for instance, from a D common line 2a, a leading line 23p, a D line 23, a shortcircuit 3, a G line 13, a leading line 13p to a G common line 1a. An infrared image when the heat is generated in the course is detected at 5. The course generating heat is made apparent from the difference of infrared images between lines 1a and 2a before and after the voltage is impressed. Moreover, the intensity distribution is obtained from the difference of images changing because of the presence/absence of a transmitted light from an infrared source 6. Accordingly, an image showing the difference at the material of patterns distinctively is obtained. The position of the shortcircuit is specified from an intersection of the heat generating leading lines. The generating amount of heat is different corresponding to the generating state of the shortcircuit defect. Therefore, for example, if a conduction indicating a shortcircuit is detected through a conduction inspection, a voltage is impressed between common lines and the position of the shortclrcuit is detected at high speeds while the substrate 4 is enlarged by a low magnification objective lens 42. Then, the lens 42 is changed to a high magnification objective lens 41 and the position is detected with high accuracy.
Inventors:
Makoto Ono
Shunji Maeda
Hitoshi Kubota
Shunji Maeda
Hitoshi Kubota
Application Number:
JP273993A
Publication Date:
November 19, 2001
Filing Date:
January 11, 1993
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
G01B11/24; G01N25/72; G01R31/02; H01L21/66; H04N7/18; (IPC1-7): G01N25/72; G01B11/24; G01R31/02; H01L21/66; H04N7/18
Domestic Patent References:
| JP472552A | ||||
| JP212046A | ||||
| JP57149927A | ||||
| JP63236341A |
Attorney, Agent or Firm:
Katsuo Ogawa (2 outside)